首页> 外国专利> LORENTZ ACTUATOR, OBJECT POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS AND LORENTZ ACTUATOR OPERATING METHOD

LORENTZ ACTUATOR, OBJECT POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS AND LORENTZ ACTUATOR OPERATING METHOD

机译:洛伦茨执行器,对象定位系统,光刻设备和洛伦茨执行器的操作方法

摘要

A Lorentz actuator includes: a magnet arrangement; a coil arrangement; and a current controller for supplying a current to the coil arrangement; wherein the magnet and coil arrangement are moveable relative to each other in a main direction, wherein the coil arrangement has a first and second coil portion that are separately operable by the current controller, such that when the same current is supplied to the first coil portion as is supplied to the second coil portion, Lorentz forces generated in the main direction by the first and second coil portions are also the same, and wherein the current controller is configured to supply a current to the first and second coil portions with a phase difference in order to compensate for parasitic reluctance and/or Lorentz forces in an auxiliary direction perpendicular to the main direction.
机译:洛伦兹致动器包括:磁铁装置;线圈装置;电流控制器,用于向线圈装置供应电流。其中,磁体和线圈装置可在主方向上相对移动,其中,线圈装置具有可通过电流控制器分别操作的第一和第二线圈部分,从而当相同的电流提供给第一线圈部分时当被供应至第二线圈部分时,由第一线圈部分和第二线圈部分在主方向上产生的洛伦兹力也相同,并且其中电流控制器被配置为以相位差向第一线圈部分和第二线圈部分供应电流。为了补偿垂直于主方向的辅助方向上的寄生磁阻和/或洛伦兹力。

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