首页>
外国专利>
Growth of carbon nanotube (CNT) leads on circuits in substrate-free continuous chemical vapor deposition (CVD) process
Growth of carbon nanotube (CNT) leads on circuits in substrate-free continuous chemical vapor deposition (CVD) process
展开▼
机译:无基底连续化学气相沉积(CVD)工艺中电路上碳纳米管(CNT)引线的生长
展开▼
页面导航
摘要
著录项
相似文献
摘要
A method and structure for an electrical device and a plurality of electrical circuits including a plurality of carbon nanotubes (CNTs). The method can include forming a first CNT catalyst layer including a plurality of first CNT catalyst plugs, a plurality of electrical circuits electrically coupled to the first CNT catalyst layer, and a second CNT catalyst layer including a plurality of second CNT catalyst plugs electrically coupled to the second CNT catalyst layer. CNTs may be simultaneously formed on the plurality of first and second CNT catalyst plugs within a chemical vapor deposition (CVD) furnace.
展开▼