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Methods of coating surfaces using initiated plasma-enhanced chemical vapor deposition
Methods of coating surfaces using initiated plasma-enhanced chemical vapor deposition
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机译:使用引发的等离子体增强化学气相沉积法涂覆表面的方法
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摘要
Disclosed is an organic coating with a high degree of global planarization. Further disclosed is an iPECVD-based method of coating a substrate with an organic layer having a high degree of global planarization. Disclosed is a flexible, alternating organic and inorganic multi-layer coating with low water permeability, a high-degree of transparency, and a high-degree of global planarization. Also disclosed is an iPECVD-based method of coating a substrate with the alternating organic and inorganic multi-layer coating.
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