首页>
外国专利>
Feature selection and automated process window monitoring through outlier detection
Feature selection and automated process window monitoring through outlier detection
展开▼
机译:通过离群值检测进行功能选择和自动过程窗口监控
展开▼
页面导航
摘要
著录项
相似文献
摘要
Feature extraction and classification is used for process window monitoring. A classifier, based on combinations of metrics of masked die images and including a set of significant combinations of one or more segment masks, metrics, and wafer images, is capable of detecting a process non-compliance. A process status can be determined using a classifier based on calculated metrics. The classifier may learn from nominal data.
展开▼