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POROUS SILICON FROM METAL-SILICON ALLOY AND PROCESS FOR ITS MANUFACTURE.
POROUS SILICON FROM METAL-SILICON ALLOY AND PROCESS FOR ITS MANUFACTURE.
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机译:金属硅合金中的多孔硅及其制造工艺。
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摘要
The present invention relates to porous Si structure obtained from etching of metal-Si alloy and a process for production of porous silicon from metal-Si alloy. Importantly, the simple and cost effective process for production of porous Silicon provides porous Si powder with high specific area and porosity, wherein the process starts from metal-Si alloy containing more than 30% silicon. Advantageously, the proposed process provides a high throughput industrially scalable route that can produce porous silicon of desired purity grade satisfying specific application requirements. By using Metal-Si alloy containing Si more than 30% leading to higher yield by minimizing material losses. The porous Si can find industrial applications such as solar cell, biosensors, tissue engineering, medical therapeutics and diagnostics, drug delivery, rechargeable batteries, materials for energy applications, photonics, and MEMS (Micro Electro Mechanical Systems) and the likes. Advantageously also, the process for producing porous silicon can also be utilized for hydrogen gas generation also.
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