首页> 外国专利> METHOD FOR OPERATING AN INLINE COATING SYSTEM AND INLINE COATING SYSTEM.

METHOD FOR OPERATING AN INLINE COATING SYSTEM AND INLINE COATING SYSTEM.

机译:用于操作在线涂层系统的方法和在线涂层系统。

摘要

The invention relates to a method for operating an inline coating system which has an introduction chamber (220) comprising an introduction gate (260), a first buffer chamber (221) which connects to the introduction chamber (220) and which can be separated from the introduction chamber (220) by means of a first sluice gate (261), a process chamber (235) which is connected to the first buffer chamber (221) and which can be separated from the buffer chamber (221) by means of a second sluice gate (264), a second buffer chamber (222) which connects to the process chamber (235) and which can be separated from the process chamber (235) by means of a third sluice gate (265), a discharge chamber (240) comprising an output gate (263) and which is connected to the second buffer chamber (222) and which can be separated from the second buffer chamber (222) by means of a fourth sluice gate (262), wherein the introduction chamber (220), the buffer chamber (221), the buffer chamber (222) and the discharge chamber (240) are designed as a module for the accommodation of substrates up to a predetermined size, wherein the substrates (200) for the coating are transported from the introduction chamber (220) through the first buffer chamber (221) to the process chamber (235) and from the process chamber (235) through the second buffer chamber (222) to the discharge chamber (240), characterized in that the first buffer chamber (221) has a gap sluice device comprising at least one gap opening (221b) by means of which a pressure gradient between the pressure in the area of the second sluice gate (264) and the pressure in the area of the first sluice gate (261) is adjusted within the first buffer chamber (221) when the first sluice gate (261) is open or closed. The invention further relates to an inline coating system for carrying out the method.
机译:本发明涉及一种用于操作在线涂覆系统的方法,该系统具有引入室(220),该引入室包括引入门(260),第一缓冲室(221),该第一缓冲室连接到引入室(220)并且可以与之分离。引入室(220)通过第一闸门(261),处理室(235)连接到第一缓冲室(221),并可以通过缓冲液与缓冲室(221)分离第二闸门(264),第二缓冲室(222),其连接到处理室(235),并且可以通过第三闸门(265)与处理室(235)分离,排放室( 240)包括一个输出门(263),该输出门连接到第二缓冲室(222),并且可以通过第四闸门(262)与第二缓冲室(222)分开,其中引入室(263) 220),缓冲室(221),缓冲室(222)和圆盘容纳腔室(240)被设计为用于容纳最大预定尺寸的基板的模块,其中用于涂层的基板(200)从引入腔室(220)通过第一缓冲腔室(221)被传送到工艺腔室(235)并从处理腔室(235)穿过第二缓冲腔室(222)到排出腔室(240),其特征在于,第一缓冲腔室(221)具有间隙闸板装置,该间隙闸板装置包括至少一个间隙开口( 221b),在第一缓冲室(221)中,通过该压力梯度在第二闸门(264)区域内的压力与第一闸门(261)区域内的压力之间调节压力梯度。水闸(261)打开或关闭。本发明还涉及用于执行该方法的在线涂覆系统。

著录项

  • 公开/公告号MX2017010439A

    专利类型

  • 公开/公告日2018-01-23

    原文格式PDF

  • 申请/专利权人 BÜHLER ALZENAU GMBH;

    申请/专利号MX20170010439

  • 发明设计人 UDO SCHREIBER;INGO WEGENER;JUTTA TRUBE;

    申请日2016-02-15

  • 分类号C23C14/56;C23C16/54;

  • 国家 MX

  • 入库时间 2022-08-21 12:51:14

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