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gyroscope mim with adjustment of frequency and electrostatic cancellation error square
gyroscope mim with adjustment of frequency and electrostatic cancellation error square
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机译:陀螺仪mim调整频率和消除静电的误差平方
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摘要
A MEMS gyroscope (60, 100), wherein a suspended mass (111-114) is mobile with respect to a supporting structure (125, 127). The mobile mass is affected by quadrature error caused by a quadrature moment; a driving structure (77) is coupled to the suspended mass for controlling the movement of the mobile mass in a driving direction at a driving frequency. Motion-sensing electrodes (130), coupled to the mobile mass, detect the movement of the mobile mass in the sensing direction and quadrature-compensation electrodes (121-124) are coupled to the mobile mass to generate a compensation moment opposite to the quadrature moment. The gyroscope is configured to bias the quadrature-compensation electrodes with a compensation voltage so that the difference between the resonance frequency of the mobile mass and the driving frequency has a preset frequency-mismatch value.
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