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MEMS GYROSCOPE WITH FREQUENCY REGULATION AND ELECTROSTATIC CANCELLATION OF THE QUADRATURE ERROR
MEMS GYROSCOPE WITH FREQUENCY REGULATION AND ELECTROSTATIC CANCELLATION OF THE QUADRATURE ERROR
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机译:具有频率调节和静电消除正交误差的MEMS陀螺仪
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摘要
A MEMS gyroscope, wherein a suspended mass is mobile with respect to a supporting structure. The mobile mass is affected by quadrature error caused by a quadrature moment; a driving structure is coupled to the suspended mass for controlling the movement of the mobile mass in a driving direction at a driving frequency. Motion-sensing electrodes, coupled to the mobile mass, detect the movement of the mobile mass in the sensing direction and quadrature-compensation electrodes are coupled to the mobile mass to generate a compensation moment opposite to the quadrature moment. The gyroscope is configured to bias the quadrature-compensation electrodes with a compensation voltage so that the difference between the resonance frequency of the mobile mass and the driving frequency has a preset frequency-mismatch value.
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