PIEZO MEMS MICROPHONE AND MANUFACTURING METHOD THEREFOR

摘要

The present invention relates to a piezo MEMS microphone and a manufacturing method therefor, the microphone comprising: a substrate having a sound chamber formed in a central lower part thereof; a diaphragm formed at an upper part and having at least one venthole in a central part thereof; a ring-shaped lower electrode formed on the outermost circumference of the diaphragm; a ring-shaped piezoelectric element formed at an upper part of the lower electrode; and an upper electrode formed at an upper part of the piezoelectric element. The present invention provides: the piezo MEMS microphone, which, unlike in a conventional technique, improves a signal to noise ratio (SNR) by arranging the piezoelectric element on the outer circumference of the diaphragm, is easy to manufacture, can reduce unit cost, and has improved SNR and performance; and the manufacturing method therefor.