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FLOWABLE AMORPHOUS SILICON FILMS FOR GAPFILL APPLICATIONS
FLOWABLE AMORPHOUS SILICON FILMS FOR GAPFILL APPLICATIONS
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机译:适用于加气装置的可流动非晶硅薄膜
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摘要
Methods for seam-less gapfill comprising forming a flowable film by PECVD and curing the flowable film to solidify the film. The flowable film can be formed using a higher order silane and plasma. A UV cure, or other cure, can be used to solidify the flowable film.
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