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Flowable amorphous silicon films for gap fill applications
Flowable amorphous silicon films for gap fill applications
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机译:用于间隙填充应用的可流动非晶硅膜
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摘要
Methods for negligible gap filling include forming a flowable film by PECVD and curing the flowable film to solidify the flowable film. The flowable film can be formed using higher order silanes and plasmas. UV curing or other curing may be used to solidify the flowable film.
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