STRUCTURE AND MANUFACTURING METHOD FOR IGZO-TFT-BASED BOA LIQUID CRYSTAL PANEL

摘要

A structure and manufacturing method for an IGZO-TFT-based BOA liquid crystal panel. The method comprises the following steps: 1) manufacturing a black matrix (2); 2) manufacturing a gate (4); 3) manufacturing a GI (5); 4) manufacturing source and drain electrodes (6); 5) manufacturing an IGZO (7); 6) manufacturing a PV (8); 7) manufacturing R/G/B (10); and 8) manufacturing an ITO (11). The manufacturing method proposes an IGZO-TFT BOA device using copper oxide as a black matrix (2) and having a co-plane structure, and effectively avoids the risk of an IGZO (7) being etched.