THIN-FILM ELECTROCHEMICAL DEVICE, METHOD OF MAKING A THIN-FILM ELECTROCHEMICAL DEVICE, AND ENERGY CONVERTING DEVICE

摘要

A thin-film electrochemical device includes a monolithic substrate, which includes a cavity enclosed by bottom and side surfaces of the substrate, and a thin-film arranged on a top surface of the substrate and enclosing the cavity. The thin-film is permeable to ions.