POROUS SILICON-BASED GAS SENSOR AND METHOD THEREOF APPLIED IN GAS DETECTION

摘要

A porous silicon-based gas sensor and method thereof applied in gas detection, the porous silicon-based gas sensor comprising a double-layer modified porous silicon consisting of a lower-layer porous silicon (2) and an upper-layer porous silicon (1) that are modified using the same method. The lower-layer porous silicon (2) is connected to the upper-layer porous silicon (1), and a bottom portion of the lower-layer porous silicon (2) is closed; gas adsorbed by the upper-layer porous silicon (1) may enter the lower-layer porous silicon (2); the average pore diameter of the upper-layer porous silicon (1) is larger than the average pore diameter of the lower-layer porous silicon (2); and a method for modifying the double-layer porous silicon comprises a gas phase method or a liquid phase method. The porous silicon-based gas sensor may continuously detect gas, may still play a role after a power failure, and has the advantages of low energy consumption, not requiring activation and being low cost. At the same time, the preparation of the porous silicon is simple and low in cost, consideration of problems such as recycling is not necessary, and the porous silicon-based sensor may be directly discarded and replaced in practical application.