IMPACT FORCE MEASURING DEVICE, SUBSTRATE PROCESSING DEVICE, IMPACT FORCE MEASURING METHOD, AND SUBSTRATE PROCESSING METHOD

摘要

The purpose of the present invention is to easily measure the impact force received by an object when multiple droplets hit the object. An impact force measuring device for achieving this purpose is one that measures the impact force applied to a substrate from a droplet discharged from a nozzle that can discharge multiple droplets toward the main face of the substrate held horizontally, wherein the impact force measuring device comprises a liquid receiver that receives the multiple droplets discharged by the nozzle toward multiple sites, and a measuring unit that measures the sum of the impact forces received by the liquid receiver from the multiple droplets. Because each impact force when a droplet hits the liquid receiver can be collectively measured, the impact force of the multiple droplets applied to the substrate can be easily measured.