首页> 外国专利> SINGLE-CHIP DOUBLE-AXIS MAGNETO-RESISTANCE ANGLE SENSOR

SINGLE-CHIP DOUBLE-AXIS MAGNETO-RESISTANCE ANGLE SENSOR

机译:单芯片双轴磁阻角传感器

摘要

A single-chip double-axis magneto-resistance angle sensor comprises a substrate (1) on an X-Y plane, and a magneto-resistance angle sensor (2) in a push-pull X axis and a magneto-resistance angle sensor (3) in a push-pull Y axis both located on the substrate. The magneto-resistance angle sensor (2) in a push-pull X axis comprises an X push arm and an X pull arm, and the magneto-resistance angle sensor (3) in a push-pull Y axis comprises a Y push arm and a Y pull arm, each of the X push arm, the X pull arm, the Y push arm and Y pull arm comprises at least one magneto-resistance angle sensing unit array. Magnetic field sensing directions of the magneto-resistance angle sensing unit arrays of the X push arm, the X pull arm, the Y push arm and the Y pull arm are along +X, -X, +Y and -Y directions respectively. Each magneto-resistance angle sensing unit (20) comprises a TMR/GMR spin valve of the same magnetic multi-layer film structure, a magnetization direction of an anti-ferromagnetic layer is obtained by laser program-control heating magnetic annealing, and a magnetic field attenuation layer can be deposited in the surface of the magneto-resistance angle sensing unit (20).
机译:单芯片双轴磁阻角传感器包括在XY平面上的基板(1),在推挽X轴上的磁阻角传感器(2)和磁阻角传感器(3)在推拉Y轴上都位于基板上。推挽X轴上的磁阻角传感器(2)包括X推臂和X拉臂,推挽Y轴上的磁阻角传感器(3)包括Y推臂和在Y拉臂中,X推臂,X拉臂,Y推臂和Y拉臂中的每一个包括至少一个磁阻角感测单元阵列。 X推臂,X拉臂,Y推臂和Y拉臂的磁阻角感测单元阵列的磁场感测方向分别沿着+ X,-X,+ Y和-Y方向。每个磁阻角感测单元(20)包括具有相同磁性多层膜结构的TMR / GMR自旋阀,通过激光程序控制加热磁退火获得反铁磁层的磁化方向,并且场衰减层可以沉积在磁阻角感测单元(20)的表面中。

著录项

  • 公开/公告号WO2018153335A1

    专利类型

  • 公开/公告日2018-08-30

    原文格式PDF

  • 申请/专利权人 MULTIDIMENSION TECHNOLOGY CO. LTD;

    申请/专利号WO2018CN76783

  • 发明设计人 DEAK JAMES GEZA;ZHOU ZHIMIN;

    申请日2018-02-14

  • 分类号G01R33/09;G01R33/04;

  • 国家 WO

  • 入库时间 2022-08-21 12:42:59

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号