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SINGLE-CHIP DOUBLE-AXIS MAGNETO-RESISTANCE ANGLE SENSOR

机译:单芯片双轴磁阻角传感器

摘要

A single-chip two-axis magnetoresistive angle sensor comprises a substrate (1) located in an X-Y plane, a push-pull X-axis magnetoresistive angle sensor (2) and a push-pull Y-axis magnetoresistive angle sensor located on the substrate. The push-pull X-axis magnetoresistive angle sensor comprises an X push arm and an X pull arm. The push-pull Y-axis magnetoresistive angle sensor comprises a Y push arm and a Y pull arm. Each of the X push, X pull, Y push arm, and Y pull arms, comprises at least one magnetoresistive angle sensing array unit. The magnetic field sensing directions of the magnetoresistive angle sensing array units of the X push, X pull, Y push, and Y pull arms are along +X, -X, +Y and -Y directions respectively. Each magnetoresistive sensing unit (20) comprises a TMR or GMR spin-valve having the same magnetic multi-layer film structure. A magnetization direction of an anti-ferromagnetic layer is set into a desired orientation through the use of a laser controlled magnetic annealing, and a magnetic field attenuation layer can be deposited in the surface of the magnetoresistance angle sensing unit (20).
机译:单芯片两轴磁阻角传感器包括位于XY平面中的基板(1),推挽X轴磁阻角传感器(2)和位于基板上的推挽Y轴磁阻角传感器。推挽X轴磁阻角传感器包括X推臂和X拉臂。推挽Y轴磁阻角传感器包括Y推臂和Y拉臂。 X推动臂,X推动臂,Y推动臂和Y推动臂中的每一个包括至少一个磁阻角度感测阵列单元。 X推,X拉,Y推和Y拉臂的磁阻角感测阵列单元的磁场感测方向分别沿着+ X,-X,+ Y和-Y方向。每个磁阻感测单元(20)包括具有相同磁性多层膜结构的TMR或GMR自旋阀。通过使用激光控制的磁退火将反铁磁层的磁化方向设定为期望的取向,并且可以在磁阻角感测单元(20)的表面中沉积磁场衰减层。

著录项

  • 公开/公告号EP3588118A1

    专利类型

  • 公开/公告日2020-01-01

    原文格式PDF

  • 申请/专利权人 MULTIDIMENSION TECHNOLOGY CO. LTD.;

    申请/专利号EP20180757297

  • 发明设计人 DEAK JAMES GEZA;ZHOU ZHIMIN;

    申请日2018-02-14

  • 分类号G01R33/09;G01R33/04;

  • 国家 EP

  • 入库时间 2022-08-21 11:38:16

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