FUNCTIONAL MEMBRANE FOR ION BEAM TRANSMISSION, BEAM LINE DEVICE USING FUNCTIONAL MEMBRANE FOR ION BEAM TRANSMISSION, FILTER DEVICE USING FUNCTIONAL MEMBRANE FOR ION BEAM TRANSMISSION, AND METHOD FOR ADJUSTING FILTER DEVICE

摘要

In order to provide a functional membrane for ion beam transmission whereby ion beam transmittance can be increased and improved emittance can be obtained, the functional membrane for ion beam transmission pertaining to the present invention has a channel and is used in a beam line device through which an ion beam advancing in one direction passes, and is characterized in that the channel axis is essentially parallel to the advancing direction of the ion beam.