FUNCTIONAL MEMBRANE FOR ION BEAM TRANSMISSION, BEAM LINE DEVICE USING FUNCTIONAL MEMBRANE FOR ION BEAM TRANSMISSION, FILTER DEVICE USING FUNCTIONAL MEMBRANE FOR ION BEAM TRANSMISSION, AND METHOD FOR ADJUSTING FILTER DEVICE

摘要

To provide a functional membrane for ion beam transmission capable of enhancing ion beam transmittance and improving beam emittance. A functional membrane for ion beam transmission according to the present invention is used in a beam line device through which an ion beam traveling in one direction passes and has a channel. The axis of the channel is substantially parallel to the travel direction of the ion beam.