VACUUM CHAMBER PRESSURE MULTI-CONTROL DEVICE AND VACUUM CHAMBER PRESSURE MULTI-CONTROL METHOD

摘要

[Problem] To connect a master valve and a set of slave valves in a manner that matches the size and internal configuration of processing equipment or meets a customer's requests so as to quickly accommodate various requests, thus avoiding uniform inflexible control. [Solution] Operation modes are associated with a group consisting of a master control device and slave control devices connected in series. In each operation mode, a generated common valve degree-of-opening signal can be transmitted from the master control device to slave control devices, or generated different valve degree-of-opening signals can be transmitted from the master control device to different slave control devices, to control the degree of opening of each slave control valve using a respective generated valve degree-of-opening signal.