FEEDBACK PARAMETER UPDATING TECHNIQUE IN PTYCHOGRAPHY ALGORITHM FOR RECONSTRUCTING DEFECTIVE IMAGES OF MASK AND PELLICLE FOR EXTREME ULTRAVIOLET EXPOSURE PROCESS TO OPTIMUM QUALITY

摘要

A feedback parameter updating technique in a ptychography algorithm for reconstructing defective images of a mask and a pellicle for an extreme ultraviolet exposure process to optimum quality may include a process of updating a feedback parameter at least one or more times during the image reconstruction process. The technique of the present invention can improve the resolution of the reconstructed images by continuously updating the feedback parameter while iteratively performing the ptychography algorithm.;COPYRIGHT KIPO 2017