Method of manufacturing resistive film for bolometer resistive film for bolometer by the same and method of manufacturing bolometer

摘要

A method for manufacturing a resistive thin film for a bolometer according to the present invention comprises the following steps: preparing a mixed solution by mixing an organic metal compound precursor solution containing at least one metal selected from a group consisting of nickel, manganese, and copper into an organic solvent; forming a metal layer using at least one metal among the metals on a substrate; forming an organic metal compound layer on the metal layer through a liquid process by using the mixed solution; and subjecting the organic metal compound layer to subsequent heat treatment in an oxidizing atmosphere to change the organic metal compound layer into an oxide resistance thin film. According to the method for manufacturing a resistive thin film for a bolometer according to the present invention, a resistive thin film for a bolometer and a thermistor bolometer having a low resistivity and a high temperature coefficient can be realized.