首页>
外国专利>
ZINC OXIDE-BASED NITRIC GAS SENSOR, METHOD FOR MANUFACTURING SENSOR, AND NITRIC GAS SENSOR HAVING SENSOR
ZINC OXIDE-BASED NITRIC GAS SENSOR, METHOD FOR MANUFACTURING SENSOR, AND NITRIC GAS SENSOR HAVING SENSOR
展开▼
机译:基于氧化锌的氮气传感器,制造方法以及具有该传感器的氮气传感器
展开▼
页面导航
摘要
著录项
相似文献
摘要
The present invention relates to a nitric gas sensor, a method for manufacturing the sensor, and a nitric gas sensing system having the sensor. The nitric gas sensor comprises: a substrate; source-drain electrodes formed on the substrate and spaced from each other; and a sensing film formed between the electrodes and having a zinc oxide core-catalyst shell particle where aluminum is doped.;COPYRIGHT KIPO 2018
展开▼