MEASURING DEVICE FOR MEASURING CAPACITANCE, AND METHOD OF CORRECTING TRANSFER POSITION DATA IN PROCESSING SYSTEM USING SAME

摘要

A measuring device for measuring capacitance is provided. The measuring device includes: a base substrate having a disc shape; a plurality of first sensors each providing a plurality of side electrodes arranged along an edge of the base substrate; one or more second sensors each having a bottom electrode provided along a bottom surface of the base substrate; and a circuit board. The circuit board is configured to apply a high-frequency signal to the plurality of side electrodes and the bottom electrodes so as to generate a plurality of first measured values indicating capacitance from each of the voltage amplitudes in the plurality of side electrodes and to generate a second measured value indicating capacitance from a voltage amplitude in the bottom electrode.;COPYRIGHT KIPO 2018