Coffee-Ring Effect The Gas Sensor Platform and the Manufacturing Method Using Coffee-Ring Effect

摘要

The present invention relates to a gas sensor manufacturing method and, more specifically, relates to a gas sensor manufacturing method capable of coating and forming a sensing material using a coffee-ring effect. The gas sensor manufacturing method using a coffee-ring effect comprises: a pattern base forming step of forming a sensor electrode pattern base on a substrate; a pattern forming step of forming a sensor electrode pattern and a microelectric heater electrode pattern on the same plane of a top surface of the pattern base; an exposure unit forming step of forming a base insulation film on the formed pattern, and then etching a set position on the top surface of the base insulation film in order to form an exposure unit to be coated with a sensing material; and a sensing material coating step of dropping droplets containing the sensing material on the exposure unit for coating, and then drying the same in order to coat the sensing material on the edge area of the dropping position by a coffee-ring effect. As such, the gas sensor platform capable of utilizing a coffee-ring effect and the manufacturing method thereof is able to induce nanoparticles which is a sensing material to be concentrated on a required sensing electrode.