SUSCEPTOR REACTOR INCLUDING SUSCEPTOR AND METHOD FOR PRODUCING SUSCEPTOR

摘要

The present invention relates to a susceptor, a deposition apparatus including the same, and a method for manufacturing a susceptor. According to an embodiment of the present invention, the susceptor comprises: a heat diffusion block including a first main surface for supporting an object to be processed to be heated, and a second main surface opposite to the first main surface, and transferring heat to the object to be processed; a first thin film heating layer stacked on the first main surface of the heat diffusion block to heat the heat diffusion block; and a first thick film insulating layer having a thermal expansion coefficient which is a value between a thermal expansion coefficient of the thermal diffusion block and a thermal expansion coefficient of the first thin film heating layer, and disposed between the first main surface of the thermal diffusion block and the first thin film heating layer to electrically insulate the thermal diffusion block and the first thin film heating layer. The first thick film insulating layer is applied on the first main surface of the heat diffusion block. The first thin film heating layer is deposited on the first thick film insulating layer to integrate the heat diffusion block, the first thick film insulating layer, and the first thin film heating layer.