ORIENTATION-CONTROLLED TRANSFER SYSTEM FOR TRANSFERRING 2-DIMENSIONAL MATERIALS AND METHOD THE THEREOF

摘要

The present invention relates to a transfer system and a method thereof enabling grating orientations of two-dimensional materials to be adjusted. The transfer system of the present invention comprises: a spectrum unit which detects respective grating orientations from the polarization Raman spectral signals of a first two-dimensional material and a second two-dimensional material; a rotation stage on which the first two-dimensional material is mounted; a driving unit which is installed between the rotation stage and an objective lens to mount the second two-dimensional material; and a control unit which compares the grating orientations of the first and second two-dimensional materials, rotates the rotation stage to a predetermined angle according to a comparison result to control the grating orientations, descends the driving unit and transfers the second two-dimensional material onto the first two-dimensional material to form a hetero material, wherein the control unit continuously performs a driving process of correcting an angle between respective grating orientations such that a band structure and a phonon structure can be maintained to join the first and second two-dimensional materials during the transfer process.