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Optical mask for optical alignment and optical alignment method

机译:用于光学对准的光学掩模和光学对准方法

摘要

In the photo-alignment light mask 2 and the photo alignment method, the ends of the first light-projecting pattern 313 constituting the first photo mask figure 3 are aligned in the photo mask 2, and the second light- 4), it is possible to prevent the end portions of the first substrate unit 11 and the second substrate unit 12 from being exposed at the ends of the first substrate unit 11 and the second substrate unit 12, The first substrate unit 11 on the substrate and the first substrate unit 11 on the substrate are prevented from being present in the conventional photo-alignment manufacturing process, It is advantageous to reduce the distance between the two substrate units 12, thereby increasing the substrate utilization rate.
机译:在光对准光掩模2和光对准方法中,构成第一光掩模图形3的第一光投射图案313的端部在光掩模2中对准,而第二光-4)对准,这是可能的。为了防止第一基板单元11和第二基板单元12的端部在第一基板单元11和第二基板单元12的端部处暴露,基板上的第一基板单元11和第一基板单元11防止了在传统的光取向制造工艺中存在衬底上的衬底上的缺陷,有利的是减小两个衬底单元12之间的距离,从而提高衬底利用率。

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