Determination of the interaction force of a dynamic mode atomic force microscope during imaging

摘要

Method and system for calibrating force (F12) of a dynamic mode atomic force microscope (AFM). The AFM tip 11 is disposed in the first cantilever 12. The first cantilever 12 is driven to vibrate the AFM tip 11 in the dynamic mode. The first sensor 16 measures the first parameter A1 of the vibrating AFM tip 11. And the second sensor 26 measures the second parameter A2 of the elastic member 22. [ The vibrating AFM tip 11 is moved adjacent to the elastic member 22 while measuring the first parameter A1 of the AFM tip 11 and the second parameter A2 of the elastic member 22. [ The force F12 between the vibrating AFM tip 11 and the elastic member 22 is calculated based on the measured second parameter A2 of the elastic member 22 and the constant K2 of the calibrated force.