Output Port for in-situ inspecting of cleaned carrier and method of in-situ inspecting the carrier by the port

摘要

The present invention relates to an output port for real-time inspection of a cleaned carrier, and an inspection method thereby, processing inspection of a cleaned carrier in real time so as to reduce inspection time and effectively use a space occupied by an inspection apparatus. The port and method relates to the output port connected to a cleaning unit and disposed in a loading and unloading unit for loading and unloading a carrier. The output port comprises: an inspection unit for inspecting a carrier cleaned in the cleaning unit; and a displacement unit on which the carrier finishing inspection via the inspection unit.