Output Port for in-situ inspecting of cleaned carrier and method of in-situ inspecting the carrier by the port

摘要

An output port for real-time inspection of a cleaned carrier and an inspection method therefor are disclosed which process the inspection of the cleaned carrier in real time, shorten the inspection time, and efficiently utilize the space occupied by the apparatus. The port and method are connected to the cleaner and are arranged in the loading and unloading section for loading and unloading the carrier. The output port includes an inspection section for inspecting the carrier which has been cleaned in the cleaning section, And a mounting portion for mounting the completed carrier.