ta-C ta-C ta-C composite coating layer apparatus for manufacturing ta-C composite coating layer and method for manufacturing using the same

摘要

The present invention relates to a ta-C composite coating layer doped with tin or germanium, an apparatus for manufacturing the ta-C composite coating layer, and a manufacturing method of the ta-C composite coating layer using the apparatus. More specifically, since tin or germanium has an atom radius greater than that of carbon while capable of being coupled to carbon such that residual stress reduction can be implemented. Thus, the present invention relates to the ta-C composite coated layer doped with tin or germanium, a method for manufacturing the ta-C composite coating layer in a vacuum filtration arc method, and an apparatus for manufacturing the ta-C composite coating layer. Thus, the present invention is characterized in that mechanical properties of the ta-C composite coating layer are maintained, residual stress is reduced, and the thickness of the composite coating layer is improved.