APPARATUS AND METHOD FOR MEASURING CHARACTERISTICS OF MINORITY CARRIER OF SEMICONDUCTOR MATERIAL

摘要

An objective of the present invention is to make Haynes-Shockley experiment for measuring a minority carrier of a semiconductor material easy and simple to carry out. According to the present invention, an apparatus for measuring characteristics of a minority carrier of a semiconductor material comprises a circuit unit including a test piece and a measurement circuit for measuring a minority carrier of the test piece; a measurement unit controlling an electric field formed on the test piece and a power source applied to the circuit unit and including a detection module for detecting a fine voltage generated from the measurement circuit to obtain data and a communication module transmitting the data obtained through the detection module; and a processor unit including an operation module for processing and storing the data received from the measurement unit through communication with the communication module and an output module for outputting the data processed through the operation module.;COPYRIGHT KIPO 2018