Plasma device driven by multi-phase ac or pulse current and plasma generation method

摘要

A plasma source and a plasma generation method are provided. The plasma source includes at least three hollow cathodes comprising a first hollow cathode, a second hollow cathode, and a third hollow cathode, each having a plasma exit region. Wherein the plasma source includes a power source capable of generating a plurality of output waves including a first output wave, a second output wave, and a third output wave, the first output wave and the second output wave having different phases, The output wave and the third output wave have different phases, and the first output wave and the third output wave have different phases. The first hollow cathode is electrically connected to the first output wave, the second hollow cathode is electrically connected to the second output wave, and the third hollow cathode is electrically connected to the third output wave, And is electrically connected.