Plasma device driven by polyphase alternating current or pulsed current and method for generating plasma

摘要

A plasma source and a method for generating a plasma are provided. The plasma source includes at least three holocathodes including a first holocathode, a second holocathode, and a third holocathode, each holocathode having a plasma exit region. The plasma source also includes a power source capable of forming a plurality of output waves, including a first output wave, a second output wave, and a third output wave. And the second output wave are out of phase, the second output wave and the third output wave are out of phase, and the first output wave and the third output wave are out of phase. Each of the holocathodes is electrically connected to the first output wave, the second holocathode is electrically connected to the second output wave, and the third holocathode is electrically connected to the third output wave. So that it is electrically connected to the power source.