3D Method and apparatus for deposition of atomic layer onto 3D printed matters

摘要

Disclosed is a technique in which an atomic layer is deposited on the output of an existing 3D printer so that the application of the 3D printer output product is expanded and various desired functions can be realized. According to an aspect of the present invention, there is provided a method of depositing an atomic layer on a 3D printer output capable of realizing a desired function by applying an ALD process after 3D output of a semi-finished product such as an outer shape of a product, an electrode portion, and a PCB based on a 3D printer. According to the present invention, a predetermined functional layer can be formed on an atomic layer basis even in a 3D printing semi-finished product having a complicated structure. According to another aspect of the present invention, a semi-finished product output to a 3D printer in one equipment is transferred to a load lock chamber for post-processing using a transfer robot arm, and an ALD process is applied so that a desired function can be implemented.