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3D NAND NANOCRYSTALLINE DIAMOND CARBON FILM FOR 3D NAND HARDMASK APPLICATION
3D NAND NANOCRYSTALLINE DIAMOND CARBON FILM FOR 3D NAND HARDMASK APPLICATION
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机译:用于3D NAND硬质合金应用的3D NAND纳米晶金刚石碳膜
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摘要
Nanocrystalline diamond layers for use in forming semiconductor devices and methods for using them are also disclosed herein. The device may include a substrate having a processing surface and a support surface, a device layer formed on the processing surface, and a nanocrystalline diamond layer formed on the processing layer, wherein the nanocrystalline diamond layer has an average crystal grain size of 2 nm to 5 nm . The method includes: positioning a substrate in a process chamber; depositing a device layer on the processing surface; depositing a nanocrystalline diamond layer on the device layer, the nanocrystalline diamond layer having an average crystal grain size of 2 nm to 5 nm Patterning and etching the nanocrystalline diamond layer, etching the device layer to form a feature, and ashing the nanocrystalline diamond layer from the surface of the device layer.
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