MEASUREMENT METHOD OF ROTATION ANGLE OF MULTI CHARGED PARTICLE BEAM IMAGE ADJUSTMENT METHOD OF ROTATION ANGLE OF MULTI CHARGED PARTICLE BEAM IMAGE AND MULTI CHARGED PARTICLE BEAM DRAWING DEVICE

摘要

A method for measuring a rotation angle of a multi-charged particle beam on an object according to an aspect of the present invention is a method for measuring a rotation angle of a multi-charged particle beam on a multi-charged particle beam using a plurality of representative beams smaller than the number of beams constituting the multi-Dimensional image of a plurality of representative beams based on a signal obtained by two-dimensional scanning, and a two-dimensional image is formed by using a two-dimensional image to form a multi-charged particle beam And the rotation angle of the rotor is obtained.;