Method for making micro lens array

摘要

A microlens array manufacturing method is disclosed.In this method, first, a photoresist is applied on a substrate to form a photoresist layer. Thereafter, a part of the photoresist layer is exposed using a mask, and a thin film is formed on the photoresist layer. Subsequently, the photoresist layer on which the thin film is formed is developed, and ultrasonic vibration is applied to cause the thin film to rise. Then, the entire surface of the thin film is raised to form a microlens array.;