TEMPERATURE CONTROL APPARATUS AND TEST SYSTEM

摘要

(Problem) The number of valves increases, complicating construction and control. A temperature control apparatus for controlling a temperature of a device includes a heat exchanging unit for exchanging heat with the device, a main flow channel for flowing the fluid, A mixing flow path for flowing the fluid from the main flow path and the sub flow path to the heat exchange section and a mixing flow amount of the fluid flowing from the sub flow path to the mixing flow path for the fluid flowing through the main flow path, And a flow rate adjusting unit for adjusting the flow rate.