System for broadband illumination and method of generating the broadband illumination

摘要

The broadband light source device is provided with a chamber filled with only high pressure gas and having a spherical shape. A laser emitter is provided outside the chamber. An elliptic mirror is disposed to surround the chamber while being spaced apart from the chamber. And a rod lens for collecting the light emitted from the plasma region at the center of the chamber and reflected at the elliptical mirror. And an energy supply unit provided for ionizing the high-pressure gases inside the chamber. Since the broadband light source device does not have an electrode in the chamber, the generated light has a uniform illuminance and the amount of light is uniform by the incident angle.;