Corona treatment equipment and corona treatment method

摘要

A kind of corona treatment equipment comprising: process container is provided with the mounting table for loading matrix; First gas feed unit is configured to supply first gas to process container; First plasma generating element is configured at least part of first gas being converted to the first plasma; Second gas feed unit is configured to supply second gas to process container; With the second plasma generating element, it is configured at least part of second gas being converted to the second plasma. Height of the entrance of second gas apart from mounting table is lower than height of the entrance of first gas apart from mounting table.