METHOD FOR DETERMINING OPTICAL CONSTANTS OF FILMS OF CHEMICALLY ACTIVE METALS OR THEIR ALLOYS

摘要

FIELD: measurement technology.;SUBSTANCE: invention relates to methods of optical-physical measuring. Method for determining the optical constants of films of reactive metals or their alloys involves measuring the Δ and Ψ ellipsometric parameters of the film of the corresponding metal or its alloy, previously deposited by vacuum deposition on the substrate with subsequent calculation of the values of the constants. Film with a thickness of 0.5–0.6 mcm is applied to the outer surface of the lower face of a triangular 45-degree prism made of optical glass. In this case, an aluminum layer 0.5–1.0 mcm thick is applied to the outer and side surfaces of the film by vacuum deposition, and the Δ and Ψ ellipsometric parameters are determined by the formulas; , where Δ_E, Ψ_E – experimentally measured values of ellipsometric parameters, Ψ_m – minimal ellipticity of the reflected light at the Brewster angle φ_B=arctg(n₁), expressed as , where n₀ = 1 (air), n₁ = 1.51 (glass), n_cl, d_cl – the refractive index and the thickness of the air-glass transition layer, respectively.;EFFECT: technical result consists in the possibility of determining the optical constants of thin films of chemically active metals by means of the ellipsometry method in air.;1 cl, 2 dwg