Profile measuring system for a roughness - and contour measurement at a surface of a workpiece

摘要

The invention relates to a profile measuring system for a roughness - and contour measurement at a surface of a workpiece, wherein the profile measuring system is a laser interferometer with a main beam, and a reference laser beam, a sensing arm is attached to it, and a stylus arm measuring means, and this measuring means is associated with a reflector, and this reflector is arranged in the beam path of the main laser beam so, and wherein the laser interferometer and the workpiece have a common base and the sensing arm of a first feed rate against this base. The object of the invention is to provide a profile measuring system, in the case of the guideway errors of the feed, has no influence on the measurement signal and nevertheless have a measurement of both small cavities as well as complex shaped surfaces. This object is achieved in that the main beam (4) and the reference laser beam (5) along the probe arm (6), and in that the guided on the reflector (8) impinging main beam (4) parallel to the genuine on the reflector (8) reflected main beam (4) and oriented perpendicular to the feed direction of the first feed (10) and that is oriented in the beam path of the reference laser beam (5) a reference reflector (11) and the latter is arranged fixedly to the sensing arm (6) and that is connected to the reference reflector (11) impinging reference laser beam (5) parallel to the genuine at the reference reflector (11) reflected reference laser beam (5) and truly aligned parallel to the direction of advance of the first feed (10) is oriented.n="24"