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Near-photon transmission electron emission microscope

机译:近光子透射电子发射显微镜

摘要

A near-field photon transmission electron emission microscope, comprising: a. an image magnifying electron optical device comprising a cathode lens objective and an electron image detector, b. a vacuum housing having at least one port for a vacuum generating device, c. at least one electromagnetic radiation radiopaque an examination object and d. an examination slide characterized in that - the examination slide (4) between the examination subject (2) and the image magnifying electron optical arrangement is arranged, - the examination slide (4) channels (5) on the side of the examination subject (2) by in a common plane (3) lying floors (5a) are closed, on which the examination object (2) rests and which are open in the direction of the electron-optical arrangement and as a photon-electron converter (4) for the proportional conversion of the transmission image photons (1 ') the channels (5) form a matrix of openings (5b) on the opposite side of the examination object support (4) in the object plane of the cathode lens objective (8, 9, 9 ', 9 "), the channels (5) of the examination object carrier (4) are suitable by means of an emissive surface on the inner walls, p produce the roportional to the intensity of the photoelectron secondary electrons (13), - the electron-optical system with the cathode lens objective (8, 9, 9 ', 9 ") generates an enlarged electron image of the examination object (2) on an electron image detector (14).
机译:一种近场光子透射电子发射显微镜,包括:a。图像放大电子光学器件,包括阴极透镜物镜和电子图像检测器; b。真空壳体,具有至少一个用于真空发生装置的端口; c。至少一个电磁辐射不透射线检查对象; d。一种检查幻灯片,其特征在于:-在检查对象(2)和图像放大电子光学装置之间布置了检查幻灯片(4),-在检查对象(2)一侧的检查幻灯片(4)通道(5) )通过在同一平面(3)中封闭,将地板(5a)封闭,检查对象(2)放置在地板上(5a),并且在电子光学装置的方向上打开,并用作光子电子转换器(4)透射图像光子(1')的比例转换,通道(5)在阴极透镜物镜(8、9)的物平面中的检查对象支架(4)的相对侧上形成开口(5b)的矩阵,9′,9″),检查对象载体(4)的通道(5)通过内壁上的发射表面是合适的,p产生与光电子二次电子(13)的强度成比例的比例, -具有阴极透镜物镜(8、9、9',9“的电子光学系统)在电子图像检测器(14)上生成检查对象(2)的放大电子图像。

著录项

  • 公开/公告号DE102016103157B4

    专利类型

  • 公开/公告日2018-03-01

    原文格式PDF

  • 申请/专利权人 KRZYSZTOF GRZELAKOWSKI;

    申请/专利号DE201610103157

  • 发明设计人 GLEICH PATENTINHABER;

    申请日2016-02-23

  • 分类号H01J37/26;

  • 国家 DE

  • 入库时间 2022-08-21 12:34:54

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