A process for the regulation of separating amounts of a material on a base body and apparatus for depositing a material on at least one base body

摘要

The invention relates to a method for regulation of separating amounts of a material (2) on a base body (1) comprising the steps of:Providing at least one base body (1);Measurement of a mass m₁ of the base body (1) prior to deposition of the material (2);Deposition of a partial quantity of the material (2) in a predetermined deposition duration t₁;Stopping the deposition process;Measurement of a mass m₂ of the base body (1) after deposition of the partial quantity of the material (2);Determination of the deposition rate r = δm₁ / t₁, wherein δm₁ = (M₂ - M₁);Determination of the radical - deposition duration t_Radical in order to achieve a predetermined target mass m₃ of the base body (1), where t_Radical = Δm₂ / R and δm₂ = (M₃ - M₂);Renewed deposition of material (2) in order to achieve the target mass m₃ of the base body (1);Measurement of the mass of the base body (1) after the renewed deposition of the material (2).The present invention also relates to an installation for the deposition of a material (2) on at least one base body (1).n="23"