Measurement system and method for combined acquisition of surface topography and hyperspectral imaging

摘要

In particular, the present invention relates to a method and apparatus for detecting topographical and spatially resolved spectral characteristics of a surface to be examined. In this case, the method comprises: generating an illumination pattern of a first measurement light having a multiplicity of wavelengths; imaging the illumination pattern of the first measurement light onto the surface to be examined by means of a chromatic objective such that the illumination pattern for different wavelengths of the plurality of wavelengths of the first measurement light is sharply imaged at different distances from the chromatic objective; imaging the first measurement light radiated from the surface to be examined by means of the chromatic objective onto a confocal mask which has a transmission pattern corresponding to the illumination pattern; a spectral splitting of the first measuring light transmitted through the confocal mask; a spatially resolved detection of a 2-dimensional intensity distribution of the spectrally split first measurement light by means of a detector; determining the topographic properties of the surface to be examined on the basis of the intensity distribution of the first measuring light detected by means of the detector; a homogeneous illumination of the surface to be examined by means of a second measuring light having a plurality of wavelengths; imaging the second measurement light emitted from the surface to be examined by means of the chromatic objective onto the confocal mask; spectral splitting of the second measuring light transmitted through the confocal mask; a spatially resolved detection of a 2-dimensional intensity distribution of the spectrally split second measuring light by means of the detector; and determining the spatially resolved spectral properties of the surface to be examined on the basis of the intensity distribution of the second measuring light detected by the detector.