Apparatus for generating a non-thermal atmospheric pressure plasma and method for frequency control of a piezoelectric transformer

摘要

The invention relates to a device for producing a non-thermal atmospheric pressure plasma, comprising a piezoelectric transformer (1), a drive circuit (11) which is adapted to apply an AC voltage having a drive frequency as an input voltage to the piezoelectric transformer (1), and a field probe (15) configured to measure a field strength of an electric field generated by the piezoelectric transformer (1), the drive circuit (11) being configured to take the drive frequency in consideration of the measurement results of the field probe (15) adjust so that the field strength is maximized. According to a further aspect, the invention relates to a method for frequency control of a piezoelectric transformer.