Ultrasonic test equipment using nonlinear frequency analysis and evaluation method thereof

摘要

An ultrasonic test equipment includes: a signal generating mechanism that generates a voltage waveform; an ultrasonic transmitting mechanism that excites ultrasonic vibrations having a lower frequency than a predetermined frequency to an object to be tested; an ultrasonic receiving mechanism that receives an ultrasonic response from the object to be tested; an AD converting mechanism that digitizes the received ultrasonic waveform; an analyzing mechanism that performs frequency analysis of the digital ultrasonic waveform digitized by the AD converting mechanism; an evaluating mechanism that extracts a variation of a nonlinear ultrasonic component from a frequency component of the digital ultrasonic wave obtained by the frequency analysis, compares the variation with defect data information in a defect information database, identifies a physical quantity of defect information of the object to be tested, and evaluates a defect in the object to be tested; and a control mechanism that partly or entirely controls a measurement system.