SINGLE-CRYSTAL DIAMOND, METHOD FOR MANUFACTURING SINGLE-CRYSTAL DIAMOND, AND CHEMICAL VAPOR DEPOSITION DEVICE USED IN SAME

摘要

Provided is a method for manufacturing a single-crystal diamond, the method including the steps of: forming a protective film on at least a part of a surface of an auxiliary plate; preparing a diamond seed crystal substrate; disposing an auxiliary plate with a protective film that has the protective film formed on the auxiliary plate, and a diamond seed crystal substrate in a chamber; and growing a single-crystal diamond on a principal surface of the diamond seed crystal substrate by a chemical vapor deposition method while introducing a carbon-containing gas into the chamber.